Improvements in TOF-SIMS instrumentation for analytical application and fundamental research [Elektronische Ressource] / vorgelegt von Thomas Grehl
100 Pages
English

Improvements in TOF-SIMS instrumentation for analytical application and fundamental research [Elektronische Ressource] / vorgelegt von Thomas Grehl

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Thomas GrehlImprovement in TOF-SIMSInstrumentation forAnalytical Application andFundamental Research2003Experimentelle PhysikImprovements in TOF-SIMSInstrumentation forAnalytical Application andFundamental ResearchInaugural-Dissertationzur Erlangung des Doktorgradesder Naturwissenschaften im Fachbereich Physikder Mathematisch-Naturwissenschaftlichen Fakultätder Westfälischen-Wilhelms Universität Münstervorgelegt vonThomas Grehlaus Delmenhorst– 2003 –Dekan: Prof. Dr. H. ZachariasErster Gutachter: Prof. Dr. A. BenninghovenZweiter Gutachter: Prof. Dr. H. F. ArlinghausTag der mündlichen Prüfungen: 10. + 14. 4. 2003Tag der Promotion: 14. 4. 2003Table of Contents1 Introduction 32 Sputtering and Secondary Ion Emission 72.1 Sputtering 72.2 Secondary Ion Formation 112.2.1 Electron Tunneling Model 122.2.2 Bond Breaking Model 142.2.3 Recombination Model 142.3 Sputter Depth Profiling 152.3.1 Depth Calibration 162.3.2 Concentration Calibration 172.3.3 Depth Resolution and Response Function 173 TOF-SIMS: Basics and Instrumentation 213.1 Principles of TOF-SIMS 213.2 Dual Beam Technique for Depth Profiling 233.3 Instrumentation 253.3.1 Description of the TOF-SIMS IV 253.3.

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Published 01 January 2003
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Language English
Document size 2 MB